5. Nano Material - Nanmat Technology Co., Ltd.
( Origin : Taiwan )
(1) cvd precursors- teos,tepo,tmpo,teb,tmb, ild & low k dielectrics, tmcts,4ms,dmdmos,omcts, interconnect ( metal), al precursor, mpa, cu (i), cu (ii) precursors, diffusion barriers, tdmat, tdeat, ticl4, tbtdet, tbtden, pdmat, high k dielectrics, taeto, temah, temaz, bst, pzt, plzt precursors. (2) Nano Material & coating- metal surface pretreatment & Nano solution, optical coating & Nano solution. (3) Nano Material technology development and application....
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