Description :

Option item:
1. Microscope X-Y stage.
2. Microscope tilting (up/down).
3. Probe card holder.
4. Streo-microscope.
5. RF/active probing (picoprobe).

Specification :

1. 8" Wafer/RF/LD&PD/OLED probe station.

2. Size: 4", 6", 8", 12".

3. X-Y Stage: (1) Backlash free movement X-Y stage. (2) X-Y movement: 4 x 4", 6 x 6", 8 x 8", 12 x 12". (3) X-Y stage resolution: 10um.

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  Probe Stations
• 
  4" Probe Stations
• 
  Cryogenic Prober Station